Datos académicos de la tesis doctoral «Study of surface phenomena acting during ion beam oxidation of semiconductors and chemical etching of ultra-thin oxides«
Título de la tesis: Study of surface phenomena acting during ion beam oxidation of semiconductors and chemical etching of ultra-thin oxides
Autor: Alay Rodriguez Josep LLuis
Universidad: Barcelona
Fecha de lectura de la tesis: 01/01/1994
Dirección y tribunal
Director de la tesis
Tribunal
Presidente del tribunal: Albert Cornet
Wilfried Vandervorst (vocal)
Francesc Salvat (vocal)
Luisa Gonzalez (vocal)
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